Organic, acid, and alkali gases emitted from semiconductor processes and special environments can be treated with adsorbents.
Noxious gases can be removed without by-products by physical or chemical adsorption method.
Since the process is simple, facility installation is easy if space is secured.
SARB - THC
Organic gas treatment |
SARB - A00
Acid gas treatment |
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SAA - 20 (SARB - SERISE)
Organic and alkaline gas treatment |
SAR - 00 (SARB - ACID)
Acid gas treatment |
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SKR - 10
Sulfur gas treatment |
SKRB - 00
Acid gas treatment |
SKR - 00
Halogen gas treatment |
SKR - 30
Special gas treatment |
SKR - 50
Alkaline gas treatment |